Numerical inverse method of determining film parameters of uniaxial anisotropic film with an ellipsometer

A numerical inversion method of ellipsometry has been developed for determining optical constants and the thickness of uniaxial anisotropic film, of which the optical axis is perpendicular to the film surface. The method of changing film thickness has been proposed to obtain multiple independent ellipsometric equations that can separate the calculation of optical constants and the thickness of the film and reduce the three-parameter problem to a two-parameter problem. A flow chart of the numerical inverse program is given, and an example that applies to Langmuir-Blodgett films is also illustrated.