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Long-pulse excimer laser with a variable reflectivity mirror resonator.

T J McKee, S Fendrykowski

    Applied Optics
    |August 31, 2010
    PubMed
    Summary
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    This study details a 1-J excimer laser performance using an unstable resonator. The laser produced a flat beam profile and concentrated 63% of its energy within a 39 microrad angle.

    Area of Science:

    • Laser physics
    • Optics
    • Physical chemistry

    Background:

    • Excimer lasers are crucial for various applications requiring high-intensity pulsed ultraviolet light.
    • Unstable resonator cavities are known for their ability to produce high-energy, large-volume beams.

    Purpose of the Study:

    • To characterize the performance of a 1-Joule (J) Xenon Chloride (XeCl) excimer laser.
    • To evaluate the impact of a variable reflectivity mirror unstable resonator optical cavity on laser output characteristics.

    Main Methods:

    • Utilized a 1-J XeCl excimer laser system.
    • Employed a variable reflectivity mirror unstable resonator optical cavity.
    • Analyzed near-field beam profile and far-field energy distribution.

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    Main Results:

    • The laser output beam exhibited a flat profile in the near field.
    • The far-field energy distribution showed high directivity, with approximately 63% of the energy contained within a 39 microrad angle (1/e(2) spot size).

    Conclusions:

    • The variable reflectivity mirror unstable resonator effectively enhances the beam quality of the XeCl excimer laser.
    • The achieved energy concentration in the far field indicates suitability for applications requiring precise energy delivery.