Long-pulse excimer integrated master-oscillator-power-amplifier optical cavity

The performance of an integrated master-oscillator-power-amplifier optical cavity to extract polarized, linenarrowed, tunable, and near-diffraction-limited radiation efficiently from a long-pulse wide-aperture electric discharge XeCl excimer laser is described. Pulse energies of 600 mJ with signal purity exceeding 95% have been achieved from a single laser.