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Performance comparison of positive branch unstable resonator cavities for excimer lasers

T J McKee, G T Boyd

    Applied Optics
    |June 10, 2010
    PubMed

    Abstract:

    The near- and far-field performance of three practical positive branch unstable resonator designs was compared for a commercial excimer laser operating on ArF and KrF. Atmospheric attenuation at 193 and 248 nm was measured.

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