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Long-term stability of a Mo/Si multilayer structure

T W Barbee, J C Rife, W R Hunter

    Applied Optics
    |September 11, 2010
    PubMed

    Abstract:

    The normal-incidence reflectance of a Mo/Si multilayer mirror, with peak reflectance near 130 A, was measured over a period of 20 months by using synchrotron radiation. The measured reflectances were unchanged over this period of time, and this indicates that the material layers and interfaces were stable.

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