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Long-term stability of a Mo/Si multilayer structure
Applied Optics
|September 11, 2010
Abstract:
The normal-incidence reflectance of a Mo/Si multilayer mirror, with peak reflectance near 130 A, was measured over a period of 20 months by using synchrotron radiation. The measured reflectances were unchanged over this period of time, and this indicates that the material layers and interfaces were stable.
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