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Updated: Jun 8, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Low-frequency electromagnetic (eddy-current) holography for imaging in conductors
Abstract:
Typical eddy-current system test data consist of the values of the system's probe impedance. The wave theory that links the phase response of the eddy-current probe impedance to the defect location relative to the probe is presented. The technique of phase multiplying the diffraction-limited hologram generated from the probe impedance is discussed. The effects and limitations of this technique are illustrated with a mathematical model of the eddy-current probe. Experimental data are presented that confirm the theoretical analysis and illustrate the ability to focus eddy-current holographic data by using backward wave propagation.
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