Development of a cryogenic stage for an ion-milling instrument
Masami Terauchi1, Futami Satou, Hideo Sugizaki
1Institute of Multidisciplinary Research for Advance Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan. terauchi@tagen.tohoku.ac.jp
Journal of Electron Microscopy
|October 12, 2010
Abstract:
A specimen-cooling device has been designed, manufactured and integrated into a commercial ion-milling instrument for transmission electron microscopy. The instrument enables us to prepare section specimens of tin-plated Cu without forming intermetallic compound particles and/or voids. The results show that cooling of specimen during ion-milling process is necessary for fine structure investigations of low melting temperature materials.
