Scanning Electron Microscopy
Overview of Microscopy Techniques
Electron Microscope Tomography and Single-particle Reconstruction
Overview of Electron Microscopy
Electron Behavior
Transmission Electron Microscopy
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Updated: Jun 8, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
James M LeBeau1, Scott D Findlay, Leslie J Allen
1Materials Department, University of California, Santa Barbara, California 93106-5050, United States.
High-angle annular dark-field imaging in scanning transmission electron microscopy enables precise atom counting and localization in 3D specimens. This technique also allows direct measurement of the microscope
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