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One-dimensional Wolter optics with a sub-50 nm spatial resolution

S Matsuyama1, T Wakioka, N Kidani

  • 1Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan. matsuyama@prec.eng.osaka-u.ac.jp

Optics Letters
|November 3, 2010
PubMed

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