Efficient encoding algorithms for computer-aided design of diffractive optical elements by the use of electron-beam...

One of the general requirements of a computer-aided design system is the existence of efficient (in data size and running time) algorithms that are generally reliable for the broadest range of design instances. The restricted data formats of the electron-beam machines impose difficulties in developing algorithms for the design of diffractive optical elements (DOE's) and computer-generated holograms (CGH's). Issues that are related to the development of CGH algorithms for e-beam fabrication of DOE's and CGH's are discussed. We define the problems the CGH algorithms need to solve, then introduce general curve drawing algorithms for the e-beam data generation of diffractive optical components. An efficient algorithm for general aspherical DOE's is proposed. Actual design and fabrication examples are also presented.