Gray-scale masks for diffractive-optics fabrication: II. Spatially filtered halftone screens

Fabrication of diffractive optics with binary masks requires multiple photolithographic processes to produce efficient, continuous profile elements (kinoforms). Alignment or etching errors at any stage of fabrication decrease the efficiency of the element. We developed two accessible procedures that minimize fabrication complexity, component turnaround time, and cost. The first technique [Appl. Opt. 34, 7507-7517 (1995)] uses gray-scale masks produced by commercial slide-imager systems. Here, we report on an alternative technique for producing gray-scale masks by spatial filtering of halftone screens. Using the photoreduced gray-scale patterns as lithographic masks, we fabricated diffractiveoptic blazed gratings and lens arrays in both photoresist and quartz. First-order efficiencies as high as 70% are reported. Also, the strengths and limitations of this technique are compared with the previously reported slide-imager method as well as other fabrication methods.