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Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)
Published on: June 17, 2017
Nanomechanics for MEMS: a structural design perspective.
Antonio Rinaldi1, Silvia Licoccia, Enrico Traversa
1NAST center and Department of Chemical Science and Technology, University of Rome Tor Vergata, Via della Ricerca Scientifica, Roma, 00133, Italy. antonio.rinaldi@uniroma2.it
Nanoscale
|December 22, 2010
Summary
New criteria are needed for size-dependent structural analysis of microelectromechanical systems (MEMS). This survey covers nanomechanics of metals, focusing on sample-size effects crucial for MEMS design and performance.
Area of Science:
- Materials Science
- Mechanical Engineering
- Nanotechnology
Background:
- Microelectromechanical systems (MEMS) design relies heavily on understanding material properties.
- Mechanical properties of materials, especially metals, are significantly influenced by sample size at the nanoscale.
Purpose of the Study:
- To critically survey advances in the nanomechanics of metals relevant to MEMS design.
- To highlight the importance of size-dependent mechanical properties and testing effects for MEMS components.
Main Methods:
- Literature review and critical analysis of existing research on nanomechanics and MEMS.
- Focus on sample-size effects in plasticity, elasticity, and fracture of metals.
- Examination of extrinsic effects in nano-sized sample testing.
Main Results:
- Mechanical properties of metals exhibit strong sample-size dependency.
- Intrinsic properties (plasticity, elasticity, fracture) are affected by size.
- Extrinsic effects during testing of nano-sized samples can impact MEMS performance.
Conclusions:
- Existing criteria for structural analysis are insufficient for MEMS components due to size-dependent effects.
- A new framework for size-dependent structural analysis and design of MEMS is required.
- Consideration of both intrinsic and extrinsic size effects is crucial for reliable MEMS performance.
