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Microfabrication of Implantable Optics Integrated in a Microstructured Imaging Window for Advanced In Vivo Imaging
Published on: April 11, 2025
A review of microfabrication technologies: application to x-ray optics
1Laboratoire de Microstructures et de Microélectronique, 196 Av. H. Ravera, 92 220 Bagneux, France.
Journal of X-Ray Science and Technology
|February 11, 2011
Abstract:
We present an outline of various microfabrication techniques and processes, particularly for applications to x-ray optics. Emphasis is placed on both high resolution diffractive components such as gratings and zone plates and multidimensional reflective diffracting structures using multilayer interference mirrors. Some selected examples are also discussed.
