Related Experiment Video
Updated: Jun 4, 2026

15:25
Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
MEMS-based tunable terahertz wire-laser over 330 GHz.
1Department of Electrical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA. qiqin@mit.edu
Optics Letters
|March 4, 2011
Summary
We achieved continuous, single-mode tuning of a terahertz quantum cascade wire laser using a microelectromechanical systems (MEMS) plunger. This novel method allows for broad frequency adjustments, enhancing terahertz laser applications.
Area of Science:
- Terahertz (THz) Photonics
- Semiconductor Lasers
- Optoelectronics
Background:
- Terahertz (THz) quantum cascade lasers (QCLs) are crucial for spectroscopy and imaging.
- Achieving wide, continuous tuning in single-mode THz QCLs remains a significant challenge.
- Existing tuning methods often suffer from limited range, discrete steps, or mechanical complexity.
Purpose of the Study:
- To demonstrate a novel, continuous tuning mechanism for terahertz quantum cascade wire lasers.
- To achieve a broad tuning range with single-mode operation.
- To investigate the influence of different tuning elements on the laser's frequency output.
Main Methods:
- Fabrication of a narrow terahertz quantum cascade wire laser ridge (approximately λ(o)/8).
- Integration of a movable microelectromechanical systems (MEMS) side object (plunger) to manipulate the transverse optical mode.
- Utilizing silicon and metal plungers to induce redshift and blueshift tuning, respectively.
Main Results:
- Demonstrated continuous, single-mode tuning over a broad range of ~330 GHz (~8.6% of the 3.85 THz center frequency).
- Achieved ~30 GHz redshift tuning with a silicon plunger.
- Achieved ~300 GHz blueshift tuning with a metal plunger, limited by the gain medium bandwidth.
Conclusions:
- The frictionless MEMS plunger enables continuous and reversible tuning of THz QCLs.
- The demonstrated tuning mechanism offers a wide frequency adjustment range for THz laser applications.
- The blueshift tuning range is primarily limited by the gain bandwidth of the laser medium.

