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Updated: Jun 3, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Peng Gao1, Baoli Yao, Irina Harder
1State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China.
A new optical setup enables parallel two-step phase-shifting digital holographic microscopy (DHM) for real-time phase imaging. This method uses a grating pair to create dual holograms, simplifying phase microscopy applications.
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