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Updated: Jun 3, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Parallel two-step phase-shifting digital holograph microscopy based on a grating pair
Peng Gao1, Baoli Yao, Irina Harder
1State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China.
Abstract:
An optical configuration for parallel two-step phase-shifting digital holographic microscopy (DHM) based on a grating pair is proposed for the purpose of real-time phase microscopy. Orthogonally circularly polarized object and reference waves are diffracted twice by a pair of gratings, and two parallel copies for each beams come into being. Combined with polarization elements, parallel two-step phase-shifting holograms are obtained. Based on the proposed configuration, two schemes of DHM, i.e., slightly off-axis and on-axis DHM, have been implemented. The slightly off-axis DHM suppresses the dc term by subtracting the two phase-shifting holograms from each other, thus the requirement on the off-axis angle and sampling power of the CCD camera is reduced greatly. The on-axis DHM has the least requirement on the resolving power of the CCD camera, while it requires that the reference wave is premeasured and its intensity is no less than 2 times the maximal intensity of the object wave.

