Design of mechanical components for vibration reduction in an atomic force microscope.

Chulsoo Kim1, Jongkyu Jung, Woosub Youm

  • 1Department of Mechatronics, Gwangju Institute of Science and Technology, 261 Cheomdan-gwagiro (Oryong-dong), Buk-gu, Gwangju 500-712, South Korea.

Summary

Mechanical vibrations in atomic force microscopes (AFMs) are reduced by reconfiguring components. This study analyzes AFM vibrations and proposes a new design for improved performance and precision.