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Blind self-calibrating algorithm for phase-shifting interferometry by use of cross-bispectrum.

Hongwei Guo1

  • 1Lab of Applied Optics and Metrology, Department of Precision Mechanical Engineering, Shanghai University, Shanghai, 200072, China. hw-guo@yeah.net

Optics Express
|April 20, 2011
PubMed
Summary

This study introduces a blind self-calibrating algorithm for phase-shifting interferometry. It accurately estimates phase shifts from just three interferograms without prior knowledge, using cross-bispectrum analysis.

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Area of Science:

  • Optical Metrology
  • Interferometry
  • Signal Processing

Background:

  • Phase-shifting interferometry (PSI) is a key technique for optical metrology.
  • Phase shift errors introduce nonlinearities, complicating accurate measurements.
  • Existing calibration methods often require supplementary assumptions or knowledge.

Purpose of the Study:

  • To develop a blind self-calibrating algorithm for PSI.
  • To accurately measure nonlinear interactions caused by phase shift errors.
  • To estimate true phase shifts without prior information.

Main Methods:

  • Utilizes cross-bispectrum analysis to measure nonlinear interactions.
  • Employs an objective function minimization approach.
  • Requires only three interferograms for calibration.

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Main Results:

  • Successfully measures nonlinear interactions between reconstructed phases and amplitudes.
  • Accurately estimates true phase shifts.
  • Demonstrates calibration without supplementary assumptions.

Conclusions:

  • The proposed algorithm offers a robust solution for PSI calibration.
  • Enables accurate phase shift estimation even with errors.
  • Reduces the need for prior knowledge, simplifying experimental setups.