Multilayer soft lithography of perfluoropolyether based elastomer for microfluidic device fabrication.

Naga Sai Gopi Krishna Devaraju1, Marc Alexander Unger

  • 1Fluidigm Corporation, South San Francisco, CA 94080, USA. naga.devaraju@fluidigm.com

Lab on a Chip
|April 20, 2011
PubMed
Summary

New microfluidic devices made from SIFEL, a chemically resistant polymer, offer excellent solvent compatibility. This novel material fabricated using Multilayer Soft Lithography™ (MSL) is ideal for chemical applications.

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