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Updated: Jun 2, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Tunable, polarization independent, narrow-band filtering with one-dimensional crossed resonant gratings
A-L Fehrembach1, K Chan Shin Yu, A Monmayrant
1Institut Fresnel, CNRS, Ecole Centrale Marseille, Aix-Marseille Université, 13013 Marseille, France. anne-laure.fehrembach@fresnel.fr
Abstract:
We propose an optical component for widely tunable, narrow-band filtering. It takes advantage of the tunability properties, with respect to the angle of incidence, of guided-mode resonance filters. The intrinsic polarization sensitivity of the resonances is suppressed by exciting the modes through two identical, differently oriented one-dimensional gratings flanking a thick substrate. An example is provided that theoretically shows a polarization independent peak at 1.6 μm with a Q factor of 13,000 and a reflectivity greater than 99% at resonance, which is tunable over 100 nm. Finally, we discuss the fabrication limitations and conclude that the proposed configuration is realistic.
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