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Updated: Jun 2, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
J M Hogan1, J Hammer, S-W Chiow
1Department of Physics, Stanford University, Stanford, California 94305, USA.
We developed an ultra-low-noise angle sensor using a folded optical lever and Sagnac interferometer. This innovative sensor achieves a record angle sensitivity of 1.3 prad/√Hz, paving the way for future subpicoradian measurements.
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