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Locally oxidized silicon surface-plasmon Schottky detector for telecom regime
Ilya Goykhman1, Boris Desiatov, Jacob Khurgin
1Department of Applied Physics, The Benin School of Engineering and Computer Science, The Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem, 91904, Israel.
Nano Letters
|May 25, 2011
Summary
We developed a nanoscale silicon Schottky photodetector for telecom wavelengths using internal photoemission. This on-chip device, compatible with CMOS technology, shows enhanced detection for shorter wavelengths.
Area of Science:
- Optoelectronics
- Nanophotonics
- Semiconductor Devices
Background:
- On-chip photodetectors are crucial for optical communication and integrated circuits.
- Silicon-based photodetectors are desirable for CMOS compatibility.
- Surface-plasmon effects offer pathways for nanoscale optical device enhancement.
Purpose of the Study:
- To demonstrate an on-chip nanoscale silicon surface-plasmon Schottky photodetector.
- To operate the photodetector at telecom wavelengths using internal photoemission.
- To leverage self-aligned fabrication for improved device performance.
Main Methods:
- Fabrication using a self-aligned local-oxidation of silicon (LOCOS) approach on a silicon-on-insulator substrate.
- Integration of photodetector and low-loss photonic waveguide in a single fabrication step.
- Characterization of responsivity at telecom wavelengths (1.31 μm and 1.55 μm).
Main Results:
- Achieved enhanced detection capability for shorter wavelengths due to increased internal photoemission probability.
- Demonstrated responsivity of 13.3 mA/W at 1.31 μm and 0.25 mA/W at 1.55 μm.
- Successfully fabricated a nanoscale Schottky contact with precise alignment.
Conclusions:
- The developed nanoscale silicon Schottky photodetector is compatible with standard CMOS technology.
- The device shows potential for integration into monolithic opto-electronic circuitry.
- Internal photoemission and surface-plasmon effects are key to the device's performance at telecom wavelengths.
