Related Experiment Video
Updated: Jun 1, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Dual-fiber collimator with elliptical spot for optical MEMS devices
Zhanxi Huang1, Yaming Wu, Jing Xu
1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China. zxhuang@mail.sim.ac.cn
Abstract:
Fiber collimators are widely used in optical communication components and fiber-optic sensors. Ordinary fiber collimators are made with a circular beam waist radius from 100 μm to 300 μm. The circular beam waist is too large to switch or shut the beam for certain micro-electro-mechanical system (MEMS) actuators (such as MEMS linear mirrors). In this paper, a dual-fiber collimator with an elliptical spot is proposed to meet the demands of MEMS optical devices. The elliptical spot collimator has been designed and fabricated, the beam waist spot of which is an elliptical spot with a 231.6 μm long-axis radius and a 12.87 μm short-axis radius, and its coupling loss is 0.37 dB.

