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Updated: Jun 1, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Design of a vector-sum integrated microwave photonic phase shifter in silicon-on-insulator waveguides
Pengfei Qu1, Caixia Liu, Wei Dong
1State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun, 130012, China.
Abstract:
An orthogonal vector-sum integrated microwave photonic phase shifter (IMWPPS), consisting of mode-order converter multiplexers (MOCMs), a variable optical power splitter (VOPS), an optical switch (OS) and fixed time delay lines (FTDLs), was theoretically demonstrated in a silicon-on-insulator wafer. MOCMs, as a key element of our device, were employed to generate orthogonal vector signals and served as lossless optical combiners. Combining with the thermo-optical VOPS, OS and FTDLs, the microwave phase shift of 0∼2π could be achieved by a refractive index variation of 0∼15×10(-3) in the millimeter wave band. The corresponding tuning resolution was about 1.64°/°C. This work, for the first time to our knowledge, provides an attractive solution to transferring a vector-sum method based bulk MWPPS into a integrated one, which is very important for large-scale optically controlled phase array antenna.

