Chemical characterization of extra layers at the interfaces in MOCVD InGaP/GaAs junctions by electron beam methods

Cesare Frigeri1, Alexey Aleksandrovich Shakhmin, Dmitry Anatolievich Vinokurov

  • 1CNR-IMEM Institute, Parco Area delle Scienze 37/A, 43010 Parma, Italy. frigeri@imem.cnr.it.