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Updated: May 31, 2026
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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
Published on: January 9, 2014
Spherical silicon micromirrors bent by anodic bonding.
Tong Wu1, Takahiro Yamasaki, Ryohei Hokari
1Department of Nanomechanics, Tohoku University, Sendai, Japan.
Optics Express
|July 1, 2011
Summary
We developed a stable method to create spherical micromirrors from single-crystal-silicon membranes. These high-performance micromirrors can be replicated into micro lenses with accurate surface profiles.
Area of Science:
- Materials Science
- Optical Engineering
- Nanotechnology
Background:
- Micromirror fabrication is crucial for optical systems.
- Existing methods may lack stability or precision.
- Novel approaches are needed for high-performance, replicable micromirrors.
Purpose of the Study:
- To propose a novel and stable method for fabricating spherical micromirrors.
- To achieve precise control over focal length and surface accuracy.
- To demonstrate the utility of these micromirrors for replicating micro polymeric lenses.
Main Methods:
- Fabrication involves bonding a freestanding single-crystal-silicon (SCS) membrane with a fulcrum onto a glass substrate.
- Spherical surfaces are formed by the bending moment in the SCS membrane.
- Fulcrum diameter is modified to tune the focal length.
Main Results:
- Achieved smooth convex spherical surfaces with parabolic profiles within 36nm RMS error.
- Demonstrated fabrication of micromirrors with focal lengths ranging from 0.4mm to 1.6mm.
- Successfully replicated micro polymeric lenses from the fabricated micromirror molds with high accuracy.
Conclusions:
- The proposed SCS membrane bonding method offers a stable and effective route to high-quality spherical micromirrors.
- Tunable focal lengths and high surface accuracy make these micromirrors suitable for various optical applications.
- The micromirrors serve as excellent molds for producing accurate micro polymeric lenses.
