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Updated: May 31, 2026

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Nanofabrication of Gate-defined GaAs/AlGaAs Lateral Quantum Dots
Published on: November 1, 2013
First-step nucleation growth dependence of InAs/InGaAs/InP quantum dot formation in two-step growth.
Zongyou Yin1, Xiaohong Tang, Jixuan Zhang
1School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798.
Nanotechnology
|July 7, 2011
Summary
Optimizing the initial nucleation step in metal-organic vapor phase epitaxy (MOVPE) is key for high-quality Indium Arsenide (InAs) quantum dots (QDs). Reducing the V/III ratio to zero during nucleation yields high-density InAs QDs with narrow size distribution.
Area of Science:
- Materials Science
- Semiconductor Physics
- Nanotechnology
Background:
- Two-step growth is crucial for high-quality mid-infrared emissive Indium Arsenide/Indium Gallium Arsenide/Indium Phosphide (InAs/InGaAs/InP) quantum dots (QDs).
- Optimizing the first-step nucleation growth significantly impacts QD size distribution, density, and crystal quality.
Purpose of the Study:
- Investigate the effect of the V/III ratio during first-step nucleation on InAs QD formation using metal-organic vapor phase epitaxy (MOVPE).
- Determine optimal conditions for achieving high-density, narrow size distribution, and high-quality InAs QDs for mid-infrared emission.
Main Methods:
- Utilized metal-organic vapor phase epitaxy (MOVPE) for InAs QD growth.
- Systematically varied the V/III input flux ratio during the first-step nucleation phase.
- Analyzed QD characteristics including size distribution, dot density, and emission wavelength.
Main Results:
- Observed contrasting behaviors in QD formation by adjusting the V/III ratio.
- Achieved high-density InAs QDs (2.5 × 10^10 cm^-2) with narrow size distribution (∼1 nm standard deviation).
- Successfully formed InAs QDs emitting at wavelengths greater than 2.15 µm by reducing the V/III ratio to zero in the first-step nucleation.
Conclusions:
- Reducing the V/III ratio to zero during first-step nucleation is critical for forming high-quality, high-density InAs QDs.
- Optimized nucleation conditions enable the growth of InAs QDs suitable for mid-infrared emission applications.
- First-step nucleation strategy directly influences the performance of two-step grown quantum dots.

