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Updated: May 31, 2026
14:53
In Situ Detection and Single Cell Quantification of Metal Oxide Nanoparticles Using Nuclear Microprobe Analysis
Published on: February 3, 2018
Is microanalysis possible in the helium ion microscope?
David C Joy1, Brendan J Griffin
1Electron Microscopy Facility, University of Tennessee, Knoxville, TN 37996-0840, USA. djoy@utk.edu
Summary
The ORION helium ion microscope (HIM) offers limited chemical analysis. While promising techniques exist, reliable element identification and quantification across the periodic table are not yet guaranteed for HIM microanalysis.
Area of Science:
- Materials Science
- Microscopy
- Analytical Chemistry
Background:
- Chemical microanalysis is crucial for modern microscopy.
- The ORION helium ion microscope (HIM) presents new possibilities for microanalysis.
- Current HIM capabilities offer only qualitative chemical information.
Purpose of the Study:
- To investigate the chemical microanalysis capabilities of the ORION helium ion microscope (HIM).
- To evaluate the potential of various spectroscopic techniques for quantitative elemental analysis in HIM.
Main Methods:
- Analysis of ion induced secondary electron imaging.
- Rutherford backscattered imaging.
- Evaluation of secondary electron spectroscopy, Rutherford backscattered ion spectroscopy, and secondary ion mass spectroscopy for HIM.
Main Results:
- The HIM can visualize local chemical variations qualitatively using secondary electron and Rutherford backscattered imaging.
- Secondary electron spectroscopy, Rutherford backscattered ion spectroscopy, and secondary ion mass spectroscopy show promise for quantitative microanalysis in HIM.
- None of the evaluated methods currently guarantee reliable element identification or quantification across the periodic table.
Conclusions:
- The ORION HIM has potential for chemical microanalysis, but current methods are limited.
- Further development is needed to achieve reliable and quantitative elemental analysis in HIM.
- Future research should focus on improving element identification and quantification across the periodic table for HIM applications.
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