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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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Resolution limits of secondary electron dopant contrast in helium ion and scanning electron microscopy

Mark Jepson1, Xiong Liu, David Bell

  • 1Department of Materials, Loughborough University, Loughborough, Leicestershire LE11 3TU, UK. m.a.e.jepson@lboro.ac.uk

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|July 13, 2011
PubMed

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