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Single-etch grating coupler for micrometric silicon rib waveguides.

C Alonso-Ramos1, A Ortega-Moñux, L Zavargo-Peche

  • 1Departamento Ingeniería de Comunicaciones, ETSI Telecomunicación, Universidad de Málaga, 29071 Málaga, Spain. caar@ic.uma.es

Optics Letters
|July 19, 2011
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Summary
This summary is machine-generated.

This study demonstrates efficient grating couplers for silicon-on-insulator rib waveguides, achieving -2.2 dB coupling efficiency. This breakthrough simplifies fiber-chip integration for photonic devices.

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Area of Science:

  • Photonics
  • Nanotechnology
  • Materials Science

Background:

  • Grating couplers are essential for fiber-chip coupling in nanometric silicon wire waveguides.
  • Implementing efficient grating couplers in micrometric silicon-on-insulator (SOI) rib waveguides is challenging due to multimode waveguide regions.

Purpose of the Study:

  • To experimentally demonstrate efficient grating couplers in 1.5 μm-thick SOI rib waveguides.
  • To address the challenges of multimode waveguide regions in micrometric SOI rib waveguides.

Main Methods:

  • Utilized an inverse taper for adiabatic mode transformation to optimize grating coupler excitation.
  • Fabricated grating couplers in the same etch step as waveguides using i-line stepper lithography.
  • Achieved negligible higher-order Bloch mode excitation.

Main Results:

  • Demonstrated grating couplers with a coupling efficiency of -2.2 dB.
  • Achieved a 3 dB bandwidth of 40 nm.
  • Enabled wafer-scale testing and device characterization without facet preparation.

Conclusions:

  • Successfully implemented efficient grating couplers in challenging micrometric SOI rib waveguides.
  • The inverse taper design effectively manages multimode excitation.
  • The fabrication method offers cost-effective integration and testing benefits for photonic integrated circuits.