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Updated: May 30, 2026

Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes
Published on: January 19, 2020
M Zgirski1, K-P Riikonen, V Tuboltsev
1NanoScience Center, Department of Physics, University of Jyväskylä, PB 35, FI-40014 Jyväskylä, Finland.
We developed a new method using low-energy argon ion beams to precisely shrink nanostructures below 10 nm. This technique allows for controlled size reduction, shaping, and surface polishing of nanomaterials.
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