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Updated: May 30, 2026

Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects
Published on: January 4, 2016
Use of catalytic fluoride under neutral conditions for cleaving silicon-oxygen bonds
Anthony M DiLauro1, Wanji Seo, Scott T Phillips
1Department of Chemistry, The Pennsylvania University, University Park, Pennsylvania 16802, USA.
Abstract:
This Article describes the development of conditions for cleaving silicon-oxygen bonds using catalytic quantities of fluoride at neutral pH in mixed organic-aqueous solutions that contain buffer. A variety of silicon protecting groups can be removed under these conditions, which show tolerance for acid- and base-sensitive groups. A modified procedure also is presented using catalytic fluoride in anhydrous dimethyl sulfoxide-methanol, which generates primarily volatile silicon byproducts.
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