Related Experiment Video
Updated: May 30, 2026

Applying Dynamic Strain on Thin Oxide Films Immobilized on a Pseudoelastic Nickel-Titanium Alloy
Published on: July 28, 2020
Electrochemical development of hydrogen silsesquioxane by applying an electrical potential
Sebastian Strobel1, Katherine J Harry, Huigao Duan
1Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA 02139, USA. strobel@mit.edu
Abstract:
We present a new method for developing hydrogen silsesquioxane (HSQ) by using electrical potentials and deionized water. Nested-L test structures with a pitch as small as 9 nm were developed using this electrochemical technique in saline solution without adding hydroxyl ions. Furthermore, we showed that high-resolution structures can be electrochemically developed in deionized water alone. Electrochemical development is controlled by the applied voltage and may overcome several of the limitations discussed for alkaline developers, such as poor hydroxyl anion diffusion and charge repulsion effects in small trenches.
More Related Videos
Related Concept Videos
The Electrical Double Layer
Processes at Electrodes
Electrochemical Cells
Standard Electrode Potentials

