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Updated: May 29, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
Published on: August 1, 2017
Modeling chemical evolution in a cold molecular plasma: quantum dynamics of CF2(-) intermediates after electron
F Sebastianelli1, F Carelli, F A Gianturco
1Department of Chemistry and CISM, The University of Rome Sapienza, Rome, Italy.
Abstract:
A dynamical study is presented for the chemical processes induced by electrons (with energies up to about 16 eV) on gaseous CF(2) (X(1)A(1) state), one of the important components of plasma etching molecular mixtures. The nuclear deformations from the C(2v) initial geometry are seen to lead to different anionic intermediates that suggest different chemical evolutions into final fragments. All nuclear motions are shown to be effective for the formation of a variety of resonances which could lead to different final fragments. The effect of the above vibrational activation of the transient anionic states initially formed at the equilibrium geometry is analyzed and discussed in detail, providing compelling evidence and physical reasons for the fragment observations given by various experiments on such plasmas.
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