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Effect of microscopic parameters on EBSD spatial resolution.

Delphic Chen1, Jui-Chao Kuo, Wen-Tuan Wu

  • 1Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan.

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|September 21, 2011
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Summary
This summary is machine-generated.

This study quantifies how accelerating voltage and probe current impact Electron Backscatter Diffraction (EBSD) resolution. Optimal physical depth resolution of 38nm was achieved at 5kV and 10nA, highlighting the channeling effect

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Area of Science:

  • Materials Science
  • Physics
  • Analytical Chemistry

Background:

  • Electron Backscatter Diffraction (EBSD) is a crucial technique for analyzing material microstructures.
  • Understanding the factors influencing EBSD's physical resolution is vital for accurate microstructural characterization.
  • The interplay between accelerating voltage, probe current, and EBSD resolution requires quantitative investigation.

Purpose of the Study:

  • To quantitatively assess the impact of accelerating voltage and probe current on EBSD physical resolution.
  • To determine the optimal parameters for achieving the best physical resolution in EBSD measurements.
  • To investigate the influence of the channeling effect on depth resolution.

Main Methods:

  • Systematic variation of accelerating voltage (5-30kV) and probe current (1, 10, 40nA).
  • Quantitative measurement of lateral, longitudinal, and depth resolutions for copper.
  • Analysis of the ratio of longitudinal to lateral resolution under different accelerating voltages.
  • Evaluation of physical depth resolution considering the channeling effect.

Main Results:

  • At 10kV and 1nA, resolutions for copper were measured as 34.5nm (lateral), 44.7nm (longitudinal), and 46nm (depth).
  • The ratio of longitudinal to lateral resolution was below the theoretical value of 2.9 for accelerating voltages between 5-20kV.
  • The best physical depth resolution of 38nm was achieved at 5kV and 10nA, demonstrating the significant role of the channeling effect.

Conclusions:

  • Accelerating voltage and probe current significantly influence EBSD physical resolution.
  • The channeling effect substantially increases physical depth resolution compared to models that do not account for it.
  • Optimized parameters (e.g., 5kV, 10nA) are crucial for maximizing EBSD resolution and obtaining detailed microstructural information.