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Updated: May 27, 2026
16:11
Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
A calibrator based on the use of low-coherent light source straightness interferometer and compensation method
Shyh-Tsong Lin1, Sheng-Lih Yeh, Chi-Shang Chiu
1Department of Electro-optical Engineering, National Taipei University of Technology, 1, Sec.3, Chung-Hsiao East Road, Taipei 10608, Taiwan. f10402@ntut.edu.tw
Optics Express
|November 24, 2011
Summary
This study introduces a new calibrator for precise straightness measurements using a low-coherent light source interferometer and a novel compensation method. The developed system achieves high measurement resolution and stability, confirming its effectiveness for accurate straightness metrology.
Area of Science:
- Metrology and Measurement Science
- Optical Instrumentation
- Precision Engineering
Background:
- Accurate straightness measurement is critical in precision engineering and manufacturing.
- Existing methods may face limitations in resolution, stability, or working distance.
Purpose of the Study:
- To introduce a novel calibrator for straightness measurements.
- To demonstrate a system with enhanced measurement capabilities.
- To validate the applicability and advantages of the proposed calibrator.
Main Methods:
- Utilized a low-coherent light source straightness interferometer.
- Implemented a compensation method based on Wolaston prism lateral displacement sensing.
- Constructed a setup with a measurement sensitivity of 36.6°/μm.
Main Results:
- Achieved a measurement resolution of 0.019 μm.
- Demonstrated a measurement stability of 0.08 μm.
- Validated the calibrator's performance through experimental results.
Conclusions:
- The developed calibrator is effective for straightness measurements.
- The system offers an extensible working distance advantage.
- The proposed method provides high accuracy and stability for metrological applications.
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