Chiral nematic fluids as masks for lithography

Hyeon Su Jeong1, Yun Ho Kim, Ji Sun Lee

  • 1Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, Daejeon 305-701, Korea.

Summary

A novel photolithography technique utilizes cholesteric liquid crystals as a mask to imprint patterns. Applying an electric field transforms the liquid crystal into cylindrical lenses, enabling large-area parallel line creation.

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