Integrated LTCC pressure/flow/temperature multisensor for compressed air diagnostics.

Yannick Fournier1, Thomas Maeder, Grégoire Boutinard-Rouelle

  • 1Laboratoire de Production Microtechnique (LPM), École Polytechnique Fédérale de Lausanne (EPFL), Station 17, CH-1015 Lausanne, Switzerland. yannick.fournier@a3.epfl.ch

Summary

A new multisensor integrates pressure, flow, and temperature measurements for industrial compressed air systems. This device uses low-temperature co-fired ceramic (LTCC) packaging for cost-effective, integrated electro-fluidic systems.

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