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A Random-displacement Measurement by Combining a Magnetic Scale and Two Fiber Bragg Gratings
Published on: September 30, 2019
FPGA-based smart sensor for online displacement measurements using a heterodyne interferometer.
Luis Alberto Vera-Salas1, Sandra Veronica Moreno-Tapia, Arturo Garcia-Perez
1HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto, Mexico. lavera@hspdigital.org.
Sensors (Basel, Switzerland)
|December 14, 2011
Summary
This study introduces a smart sensor for precise nanometric displacement measurement using phase measurement and a heterodyne interferometer. The low-cost Field Programmable Gate Array (FPGA) system enables high-speed, adaptable online metrology.
Area of Science:
- Metrology
- Optical Measurement
- Sensor Technology
Background:
- Nanometric displacement measurement is critical for high-accuracy dimensional metrology.
- Interferometer-based systems are key tools for traceable metrology.
- Industrial applications require online, high-speed, and adaptable measurement solutions.
Purpose of the Study:
- To develop a smart sensor for large displacement measurement.
- To achieve high accuracy and resolution in displacement sensing.
- To integrate functions into a portable device for industrial use.
Main Methods:
- Development of a smart sensor based on phase measurement.
- Integration with a commercial heterodyne interferometer.
- Utilizing a low-cost Field Programmable Gate Array (FPGA) for system control.
Main Results:
- The developed sensor achieves high accuracy and resolution for displacement measurement.
- The system is designed for high-speed applications requiring online measurement.
- The reconfigurable FPGA allows for adaptable error compensation modules.
Conclusions:
- The smart sensor offers an optimal solution for high-speed, online metrology applications.
- The system's adaptability enhances its utility in diverse industrial processes.
- This development advances portable, high-performance displacement measurement technology.

