FPGA-based smart sensor for online displacement measurements using a heterodyne interferometer.

Luis Alberto Vera-Salas1, Sandra Veronica Moreno-Tapia, Arturo Garcia-Perez

  • 1HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto, Mexico. lavera@hspdigital.org.

Summary

This study introduces a smart sensor for precise nanometric displacement measurement using phase measurement and a heterodyne interferometer. The low-cost Field Programmable Gate Array (FPGA) system enables high-speed, adaptable online metrology.

Related Concept Videos