Review on the modeling of electrostatic MEMS

Area of Science:

• * Multiphysics and Electromechanical Engineering: Focuses on the intersection of electrical, mechanical, and other energy domains in microscale devices.

Background:

• * Electrostatic-driven microelectromechanical systems (MEMS) devices integrate multiple energy domains, including electromechanics, optical electricity, thermoelectricity, and electromagnetism.
• * The inherent nonlinear working states of these devices present significant analytical challenges.

Purpose of the Study:

• * To provide a comprehensive overview of electrostatic-driven MEMS devices.
• * To introduce the physical model of pull-in voltage and analyze dynamic characteristics.
• * To discuss the effects of air damping, reliability considerations, and numerical modeling methods.

Main Methods:

• * Review of physical models for pull-in voltage in electrostatic-driven MEMS.
• * Analysis of dynamic characteristics, incorporating air damping effects.
• * Exploration of reliability factors and numerical modeling techniques.

Main Results:

• * Detailed examination of the physical model governing pull-in voltage.
• * Characterization of dynamic behaviors and the influence of air damping.
• * Discussion on reliability and numerical simulation approaches.

Conclusions:

• * The analysis provides a foundational understanding of electrostatic-driven MEMS complexities.
• * Insights into pull-in voltage, dynamics, and reliability are crucial for device optimization.
• * The study highlights the importance of numerical modeling for accurate MEMS analysis and application.