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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Homoepitaxial growth of single crystal diamond membranes for quantum information processing
Igor Aharonovich1, Jonathan C Lee, Andrew P Magyar
1School of Engineering and Applied Sciences, Harvard University, MA 02138, USA. igor@seas.harvard.edu
Advanced Materials (Deerfield Beach, Fla.)
|February 1, 2012
Abstract:
Homoepitaxial growth of single crystal diamond membranes is demonstrated employing a microwave plasma chemical vapor deposition technique. The membranes possess excellent structural, optical, and spin properties, which make them suitable for fabrication of optical microcavities for applications in quantum information processing, photonics, spintronics, and sensing.
