Study of thermal and acoustic noise interferences in low stiffness atomic force microscope cantilevers and

Mokrane Boudaoud1, Yassine Haddab, Yann Le Gorrec

  • 1FEMTO-ST Institute, UMR CNRS 6174-UFC/ENSMM/UTBM Automatic Control and Micro-Mechatronic Systems Department (AS2M), Besançon, France. mokrane.boudaoud@femto-st.fr