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Updated: May 25, 2026

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
Lars Lühl1, Ioanna Mantouvalou, Wolfgang Malzer
1Bundesanstalt für Materialforschung und -prüfung, Berlin, Germany. lars.luehl@bam.de
A novel 3D Micro-XAFS spectroscopy method combines X-ray Fluorescence and X-ray Absorption Fine Structure techniques. This approach enables depth-resolved chemical speciation in stratified materials without sample destruction.
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