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Alternative post-processing on a CMOS chip to fabricate a planar microelectrode array.

Francisco López-Huerta¹, Agustín L Herrera-May, Johan J Estrada-López

¹Facultad de Ciencias Físico Matemáticas, Benemérita Universidad Autónoma de Puebla, Av. San Claudio y Río Verde, Col. San Manuel, 72570, Puebla, Puebla, Mexico. lhuerta@ece.buap.mx

Sensors (Basel, Switzerland)

|February 21, 2012

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This study introduces a novel CMOS chip with a planar microelectrode array (pMEA) for monitoring vestibular neuron activity. The chip

Area of Science:

Neuroscience
Electrical Engineering
Materials Science

Background:

Monitoring neuronal activity is crucial for understanding the nervous system.
Existing methods for neural recording often face limitations in integration and signal quality.
Vestibular ganglion neurons play a key role in balance and spatial orientation.

Purpose of the Study:

To develop an integrated CMOS chip for efficient monitoring of vestibular ganglion neuron activity.
To present an alternative post-processing technique for fabricating planar microelectrode arrays (pMEAs) on CMOS chips.
To characterize the performance of the integrated readout circuit for neural recording applications.

Main Methods:

Fabrication of a 12-pMEA chip using a 0.6 μm CMOS standard process.

Keywords:

CMOS chip CMOS post-process microelectrode array vestibular ganglion neurons

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Development of a CMOS post-processing method involving protective masks and wet etching.

Integration of an amplifier and tunable bandpass filter for signal readout.

Utilizing p+ -type silicon as both a transducer and interface layer.

Main Results:

Successful fabrication of a CMOS chip with a 4x3 electrode matrix pMEA.
The alternative post-processing effectively released the pMEA while protecting the readout circuit.
The integrated readout circuit features a tunable bandpass filter with a 98 kHz bandwidth and 87 dB CMRR.
The chip is suitable for recording neuronal activity from vestibular ganglion neurons.

Conclusions:

The developed CMOS chip and post-processing technique offer a viable platform for vestibular neuron monitoring.
The integrated readout circuit possesses characteristics suitable for high-quality neural signal acquisition.
This technology has potential applications in neuroscience research and clinical diagnostics.