Transmission Electron Microscopy
Electron Microscope Tomography and Single-particle Reconstruction
Overview of Electron Microscopy
Atomic Force Microscopy
Total Internal Reflection Fluorescence Microscopy
Atomic Emission Spectroscopy: Instrumentation
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Updated: May 24, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
David C Bell1, Christopher J Russo, Dmitry V Kolmykov
1School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA. dcb@seas.harvard.edu
This study introduces low-voltage electron microscopy for atomic resolution imaging. Aberration correction and monochromation enable sub-angstrom resolution at 40 keV, improving contrast and reducing sample damage.
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