Rapid in-process measurement of surface roughness using adaptive optics

Yiin Kuen Fuh1, Kuo Chan Hsu, Jia Ren Fan

  • 1Institute of Opto-Mechatronics Engineering, National Central University, No. 300, Jhongda Road, Jhongli City, Taoyuan County 32001, Taiwan. mikefuh@ncu.edu.tw

Optics Letters
|March 2, 2012
PubMed
Summary

This study introduces an adaptive optics system for in-process surface roughness measurement using laser scattering. The method accurately estimates roughness, correlating well with traditional methods for enhanced manufacturing precision.