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Updated: May 24, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
1School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798.
This study shows that using higher vibration modes in microdiaphragm resonating biosensors significantly enhances their mass sensing capability and quality factor (Q-factor). Operating at higher modes offers improved sensitivity without altering the biosensor
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