A miniature probe for ultrasonic penetration of a single cell

Ting Wu1, Zhaoying Zhou, Qun Wang

  • 1MEMS Lab, Department of Precision Instruments & Mechanology, Tsinghua University, Beijing 100084, P.R. China; E-Mails: zhouzy@mail.tsinghua.edu.cn ; yangxing@mail.tsinghua.edu.cn ; xiaomf03@mails.tsinghua.edu.cn.