Updated: May 24, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Christophe Martinez1, Olivier Lemonnier, Fabien Laulagnet
1CEA, LETI, MINATEC campus, DOPT, SIONA, 17 rue des Martyrs, Grenoble, 38054, France. christophe.martinez@cea.fr
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