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Related Experiment Video

Updated: May 23, 2026

In situ Grazing Incidence Small Angle X-ray Scattering on Roll-To-Roll Coating of Organic Solar Cells with Laboratory X-ray Instrumentation
06:49

In situ Grazing Incidence Small Angle X-ray Scattering on Roll-To-Roll Coating of Organic Solar Cells with Laboratory X-ray Instrumentation

Published on: March 2, 2021

Kernel-based parametric analytical model of source intensity distributions in lithographic tools.

Shiyuan Liu1, Wei Liu, Xinjiang Zhou

  • 1Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China. shyliu@mail.hust.edu.cn

Applied Optics
|April 17, 2012
PubMed
Summary
This summary is machine-generated.

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This study introduces a new analytical model to represent partially coherent illumination sources in lithography. The model accurately characterizes source distortions, aiding resolution enhancement techniques.

Area of Science:

  • Optical Engineering
  • Semiconductor Manufacturing

Background:

  • Partially coherent illumination is critical in photolithography for achieving high resolution.
  • Accurate modeling of illumination source properties and distortions is essential for advanced lithographic processes.

Purpose of the Study:

  • To propose a novel parametric analytical source model for partially coherent illumination.
  • To accurately represent the physical distribution properties and distortions of illumination sources in lithographic tools.

Main Methods:

  • Utilizing a set of smooth kernels to construct the analytical model.
  • Introducing corrected parametrical terms to characterize physical distortions and deviations.
  • Decomposing corrected parametrical terms into Fourier series to identify specific distortion types (e.g., center shift, tilt, ellipticity).

Related Experiment Videos

Last Updated: May 23, 2026

In situ Grazing Incidence Small Angle X-ray Scattering on Roll-To-Roll Coating of Organic Solar Cells with Laboratory X-ray Instrumentation
06:49

In situ Grazing Incidence Small Angle X-ray Scattering on Roll-To-Roll Coating of Organic Solar Cells with Laboratory X-ray Instrumentation

Published on: March 2, 2021

Main Results:

  • The proposed model effectively represents the physical distribution of mainstream illumination sources.
  • The model accurately characterizes various physical distortions and deviations from ideal sources.
  • Fourier series decomposition provides physically meaningful interpretations of distortion types.

Conclusions:

  • The developed analytical model offers a robust method for simulating illumination sources.
  • It provides a theoretical foundation for resolution enhancement techniques and related research in lithography.