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Updated: May 22, 2026

Non-invasive 3D-Visualization with Sub-micron Resolution Using Synchrotron-X-ray-tomography
Published on: May 27, 2008
Real space soft x-ray imaging at 10 nm spatial resolution
W Chao1, P Fischer, T Tyliszczak
1Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA. wlchao@lbl.gov
Abstract:
Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies.
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